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Science 11 December 1992:
Vol. 258. no. 5089, pp. 1766 - 1769
DOI: 10.1126/science.258.5089.1766

Articles

Single-Crystal Epitaxial Thin Films of the Isotropic Metallic Oxides Sr1–xCaxRuO3 (0 le x le 1)

C. B. Eom 1, R. J. Cava 1, R. M. Fleming 1, Julia M. Phillips 1, R. B. vanDover 1, J. H. Marshall 1, J. W. P. Hsu 1, J. J. Krajewski 1, and W. F. Peck Jr. 1

1 AT&T Bell Laboratories, Murray Hill, NJ 07974

Single-crystal epitaxial thin films of the isotropic metallic oxides Sr1–xCaxRuO3 (0 le x le 1) were grown on miscut SrTiO3(100) substrates in situ by 90° off-axis sputtering. These thin films exhibit low isotropic resistivities, excellent chemical and thermal stability, good surface smoothness, and high crystalline quality. Furthermore, the lattice parameters and magnetic properties can be varied by simply changing the strontium/calcium ratio. These epitaxial thin films, and their multilayer structures with other oxide materials, can be used for the fabrication of superconducting, ferroelectric, magneto-optic, and electro-optic devices.

Submitted on August 4, 1992
Accepted on October 9, 1992


THIS ARTICLE HAS BEEN CITED BY OTHER ARTICLES:
Enhancement of Ferroelectricity in Strained BaTiO3 Thin Films.
K. J. Choi, M. Biegalski, Y. L. Li, A. Sharan, J. Schubert, R. Uecker, P. Reiche, Y. B. Chen, X. Q. Pan, V. Gopalan, et al. (2004)
Science 306, 1005-1009
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Epitaxial BiFeO3 Multiferroic Thin Film Heterostructures.
J. Wang, J. B. Neaton, H. Zheng, V. Nagarajan, S. B. Ogale, B. Liu, D. Viehland, V. Vaithyanathan, D. G. Schlom, U. V. Waghmare, et al. (2003)
Science 299, 1719-1722
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Science. ISSN 0036-8075 (print), 1095-9203 (online)