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Articles
Ultrahigh-Resolution X-ray Tomography
1 University of California, Lawrence Livermore National Laboratory, Livermore, CA 94551, USA
Ultrahigh-resolution three-dimensional images of a microscopic test object were made with soft x-rays collected with a scanning transmission x-ray microscope. The test object consisted of two different patterns of gold bars on silicon nitride windows that were separated by Accepted on September 20, 1994
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5 micrometers. Depth resolution comparable to the transverse resolution was achieved by recording nine two-dimensional images of the object at angles between –50 and +55 degrees with respect to the beam axis. The projections were then combined tomographically to form a three-dimensional image by means of an algorithm using an algebraic reconstruction technique. A transverse resolution of 
Science. ISSN 0036-8075 (print), 1095-9203 (online)
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