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Science 15 October 1999:
Vol. 286. no. 5439, pp. 421 - 423
DOI: 10.1126/science.286.5439.421
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Perspectives

DEVICE PHYSICS:
In Search of Low-k Dielectrics

Robert D. Miller

Within the next few years, high-performance chips containing as many as 0.5 billion transistors on a single chip will be produced, containing up to 10,000 meters of on-chip wiring. However, such increased device and wiring densities cannot be achieved with currently used materials. The search is now on for materials that can replace silicon dioxide as the insulator in these future devices. But despite a bewildering number of candidate materials under investigation, a clear winner has yet to emerge.

The author is at IBM Research Division, Almaden Research Center, San Jose, CA 95120-6099, USA. E-mail: rdmiller{at}almaden.ibm.com

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THIS ARTICLE HAS BEEN CITED BY OTHER ARTICLES:
Optically Defined Multifunctional Patterning of Photosensitive Thin-Film Silica Mesophases.
D. A. Doshi, N. K. Huesing, M. Lu, H. Fan, Y. Lu, K. Simmons-Potter, B. G. Potter Jr., A. J. Hurd, and C. J. Brinker (2000)
Science 290, 107-111
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Science. ISSN 0036-8075 (print), 1095-9203 (online)